資料來源:
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Nanofabrication : principles to laboratory practice / Andrew Sarangan
- 作者： Sarangan, Andrew
- 其他題名：
- Optical sciences and applications of light
- 出版： Boca Raton : CRC Press, Taylor & Francis Group 2017
- 叢書名： Optical sciences and applications of light
- 主題： Nanolithography , Nanostructured materials--Design and construction , Semiconductors--Etching , Nanoelectronics--Experiments
- ISBN： 9781498725576 (hbk.) :: NT$3333.00
- 書目註：Includes bibliographical references and index
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讀者標籤：
- 系統號： 005156898 | 機讀編目格式
館藏資訊
This book is designed to introduce typical cleanroom processes, techniques, and their fundamental principles. It is written for the practicing scientist or engineer, with a focus on being able to tran
資料來源：
三民書局
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