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沉積鉭釔合金膜在鎢鋼上做為保護層製程及性質研究 = Study on the Process and Properties of Tantalum Yttrium Alloy Films Deposited on Tungsten Steel as a Protective Layer / 陳建榮.

館藏資訊

摘要註

在此研究中，我們詳細分析了鉭釔合金薄膜在不同熱處理條件下的物理性能，涵蓋未經熱處理、氧氣環境及混合氣體（95%氮氣+5%氫氣）環境下進行的熱處理。本研究揭示了熱處理對材料結構及性能的影響，為進一步的工業應用提供了科學依據。 未經熱處理的鉭釔合金薄膜展現了較低的表面粗糙度（1.93 nm）和摩擦係數（0.6）。在氧氣環境下進行熱處理（400°C及600°C）時，樣品的表面粗糙度和硬度值增加。在600°C熱處理後，摩擦係數變為0.84，硬度值達到10 GPa，顯示熱處理增加了薄膜的摩擦係數和硬度值。 混合氣體環境下的熱處理在600°C條件下經1至5小時熱處理的樣品中，隨著熱處理時間的延長，薄膜的表面粗糙度、摩擦係數和水接觸角均逐步增加，微小維克氏硬度亦逐步提升，五小時為11.5 GPa。在抗腐蝕方面，熱處理5小時的樣品表現最佳。 通過比較釔和鉭的標準電極電位，發現釔的電位更負，顯示其對氧的親和力更強，更易於氧化，而鉭的氧化傾向則相對較弱。 關鍵詞：鉭釔合金膜、磁控濺鍍、高溫退火、機械性能. In this study, we conducted a detailed analysis of the physical properties of Ta-Y alloy films under various heat treatment conditions, including untreated, oxygen environment, and mixed gas environment (95% nitrogen + 5% hydrogen). This research reveals the effects of heat treatment on the material's structure and properties, providing scientific basis for further industrial applications. The untreated Ta-Y alloy films exhibited low surface roughness (1.93 nm) and friction coefficient (0.6). When heat treated in an oxygen environment (400°C and 600°C), the surface roughness and hardness values of the samples increased. After heat treatment at 600°C, the friction coefficient became 0.84, and the hardness reached 10 GPa, indicating that heat treatment increased the friction coefficient and hardness of the films. Under mixed gas environment heat treatment at 600°C for 1 to 5 hours, the surface roughness, friction coefficient, and water contact angle of the films gradually increased with the extension of heat treatment time, and the micro Vickers hardness also gradually increased, reaching 11.5 GPa after five hours. In terms of corrosion resistance, the sample heat-treated for five hours performed the best. By comparing the standard electrode potentials of yttrium and tantalum, it was found that yttrium has a more negative potential, indicating a stronger affinity for oxygen and a higher tendency to oxidize, whereas tantalum's oxidation tendency is relatively weaker. The comprehensive research results show that by varying the heat treatment conditions, the surface characteristics and mechanical properties of Ta-Y alloy films can be effectively controlled. Keywords: Ta-Y alloy films, magnetron sputtering, high-temperature annealing, mechanical properties.

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