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碳含量對CrMoNbTiWC薄膜機械性質的影響 = Effect of carbon content on mechanical properties of CrMoNbTiWC films / 陳澤維.

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摘要註

自葉均蔚教授於2004年提出高熵合金(HEA)概念以來，因其兼具優異的機械性能，已成為材料科學領域的重要研究方向。HEA係由五種以上主要元素組成，且各元素原子比皆不超過35 at.% ，藉此避免單一元素主導材料性質，進而展現多元素間的協同效應。本研究採用疊加型高功率脈衝磁控濺鍍與中頻電源系統，分別使用CrMoNbW與CrMoNbTiW靶材製備六組不同碳含量之高熵碳化物薄膜。濺鍍過程中藉由電漿發射監測系統（PEM）控制乙炔氣體流量，並以Cr元素之520.8 nm光譜訊號為回饋依據，精準調控靶材毒化率於0 %至90%之間。化學成分分析結果顯示，碳含量隨靶材毒化率提升而增加，並伴隨晶相由BCC結構轉變為FCC結構。機械性質方面，隨碳含量增加薄膜硬度呈先升後降趨勢，最高達26.04 GPa；摩擦係數則隨碳含量上升逐漸下降，最低可至0.146，顯示非晶碳相具潤滑效果；於0.5 M硫酸水溶液的腐蝕測試結果顯示薄膜具良好耐腐蝕性，最高為304不銹鋼的2238倍，本研究系統性探討CrMoNbWC與CrMoNbTiWC高熵碳化物薄膜在不同靶材毒化條件下之相組成、微結構、電性與機械性質變化，顯示此類薄膜具備作為功能性耐磨、耐蝕薄膜的潛力。. Following the proposal of the concept of high entropy alloy (HEA) by Professor Jien-Wei Yeh in 2004, this field has become a major area of research in materials science, due to the excellent mechanical properties of the alloys. The HEA is composed of more than five primary elements, with the atomic ratio of each element not exceeding 35 at.%, thereby ensuring that no individual element exerts excessive dominance over the material properties and consequently demonstrating the synergistic effect between multiple elements. This study employed a superposition high-power pulsed magnetron sputtering and medium-frequency power supply system to prepare six groups of high entropy carbide films with varying carbon contents, utilising CrMoNbW and CrMoNbTiW targets, respectively. During the sputtering process, the acetylene gas flow was regulated by a plasma emission monitoring system (PEM), and the 520.8 nm spectral signal of the Cr element was utilised as feedback to ensure the target poisoning rate was maintained within the desired range of 0% to 90%. The findings of the chemical composition analysis demonstrated that the carbon content exhibited an increase in proportion to the escalation of the target poisoning rate, concomitant with the transformation of the crystal phase from the BCC (body-centred cubic) structure to the FCC (face-centred cubic) structure. In relation to the mechanical properties, the hardness of the film increases initially and subsequently decreases with an increase in the carbon content, reaching a maximum of 26.04 GPa. The friction coefficient gradually decreases with an increase in the carbon content, reaching a minimum of 0.146, indicating that the amorphous carbon phase has a lubricating effect. The corrosion test results in a 0.5 M sulfuric acid aqueous solution demonstrate that the film exhibits excellent corrosion resistance, up to 2238 times that of 304 stainless steel. This study systematically explores changes in phase composition, micros

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